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| TRAINING - F3003 |
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| F3003 - Stage Evaluation and Troubleshooting
Introduction
This four-day course is designed to provide the students with an introduction to the hardware of the air bearing stage and focus system of FPA-3000 Series steppers. The primary goal of this course is to provide the students with the basic knowledge of trouble analysis of these sub-components.
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| Performance Objectives |
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X-Y stage pressure and vacuum check |
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X-Y stage resistance check |
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X-Y stage background vibration analysis |
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Visual inspection of main unit interference |
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X-Y stage frequency response test |
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X-Y stage gain adjustment and T(mean), EGP measurement check |
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Coil resistance check |
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OPTF unit trouble analysis |
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Theta-Z tilt unit piezo replacement |
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Prerequisites
FPA 3000 i4 Operations CD ROM course and F3006
Applicable Models
i4, EX3, iW
Course Schedule
Please call for schedule |
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| Email Contact - semi-registry@cusa.canon.com
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