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| TRAINING - F3004I |
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| F3004I - i-line Illumination System
Introduction
This four-day course introduces the student to repair, maintenance, and adjustment procedures for the i-line illuminator system for 3000 Series steppers.
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| Performance Objectives
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System overview |
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Intensity and uniformity |
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Intensity degradation checks |
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Illumination system calibration |
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Uniformity degradation checks |
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FRA intensity degradation check |
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Exposure shutter replacement |
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Prerequisites
FPA 3000 i4 Operations CD ROM course and F3006 Periodic Maintenance
Applicable Models
i4, iW, i5, i5+
Course Schedule
Please call for class schedule.
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| Email Contact - semi-registry@cusa.canon.com
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