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| TRAINING - F3005X |
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| F3005X - Stage Evaluation and Troubleshooting
Introduction
This four-day course is designed to provide the students with an introduction to the hardware of the FLAT stage of the FPA-3000 Series steppers. The primary goal of this course is to provide the students with the basic knowledge of trouble analysis of the FLAT stage sub-components. |
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| Performance Objectives |
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X-Y stage pressure and vacuum check |
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X-Y stage resistance check |
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X-Y stage background vibration analysis |
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Visual inspection of main unit interference |
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T(mean), EGP measurement check |
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Bellows diaphragm adjustment (STGM) |
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Bellow leak check |
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Bellow hysteresis waveform |
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Coil resistance check |
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Prerequisites
FPA 3000 i4 Operations CD ROM course and F3006
Applicable Models
i5, i5+, EX4, EX5, EX6
Course Schedule
Please call for schedule |
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| Email Contact - semi-registry@cusa.canon.com |
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