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| TRAINING - F3006 |
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| F3006 - Periodic Maintenance
Introduction
This five-day course covers machine readiness checks, consumable items replacement, and periodic maintenance of the stepper.
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| Performance Objectives
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Machine readiness inspections and corrections |
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Stage base, reticle changer vacuum pads, and wafer feeder vacuum pads inspection and cleaning |
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Wafer flatness test and chuck cleaning |
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Inspection and maintenance of halogen, HeNe laser, and mercury light sources |
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Reticle rotation checks and update offsets |
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Auto alignment system checks and update offsets |
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Focus exposure checks and update offsets |
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Stage accuracy and matching checks and update offsets |
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C-Oil level check and replenish |
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Prerequisites
FPA 3000 i4 Operation CD ROM
Applicable Models
i4, i5, i5+
Course Schedule
Please call for schedule
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| Email Contact - semi-registry@cusa.canon.com
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