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F3007 - ABBE Explanation
Introduction
This four-day course provides the students with explanation and adjustment procedures of ABBE coefficients in 3000 Series steppers. Error phenomenona caused by ABBE coefficients are examined in this course.
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| Performance Objectives
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Laser interferometer explanation |
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ABBE explanation |
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ABBE check procedures |
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Prerequisites
FPA 3000 i4 Operations CD ROM course and F3006 Periodic Maintenance
Applicable Models
All 3000 Series steppers
2007 Course Schedule
Please call for schedule
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| Email Contact - semi-registry@cusa.canon.com
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