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F5002A - Alignment Performance
Introduction
This five-day course is designed to provide the students with in-depth explanation on the alignment system of the FPA-5000 Series scanners. The primary goal is to provide the student with the knowledge required to maintain and optimize the stepper alignment performance.
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| Performance Objectives |
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Basics of TVPA |
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Parameters of TVPA |
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TVPA sequence |
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TVPA tuning |
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Basics of AGA |
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AGA compensation mode |
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GAUS |
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Alignment error calculations |
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AGA abnormality check |
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Calibration command |
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AGA optimization |
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Mix & match overlay |
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AGA multi spot measurements |
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XY simultaneous measurement AGA |
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ABBE coefficient factor |
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Prerequisites
ES2/ES3 Scanner Operations CD-ROM or F5000 ES2/ES3 Basic Fundamentals Class and F5001 Intro to Parameters & Commands
Applicable Models
All 5000 Series steppers
Course Schedule
Please call for schedule
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| Email Contact - semi-registry@cusa.canon.com
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