|
|
F5006 - Periodic Maintenance
Introduction
This five-day course covers machine readiness check and periodic maintenance of 5000 Series scanner.
|
| |
| Performance Objectives |
| |
| |
|
Scanner introduction |
 |
| |
|
Illumination optimization |
|
| |
|
Laser axis adjustment |
|
| |
|
IL commands and IUC command |
|
| |
|
Stepping accuracy and repeatability |
|
| |
|
SKEW |
|
| |
|
Reticle scan stage calibration |
|
| |
|
Best focus |
|
| |
|
AGA exposure offset |
|
| |
|
Excimer laser gas information and status check |
|
|
|
|
| |
Prerequisites
ES2/ES3 Scanner Operations CD-ROM or F5000 ES2/ES3 Basic Fundamentals Class
Applicable Models
All 5000 Series scanners
Course Schedule
Please call for schedule
|
| |
| Email Contact - semi-registry@cusa.canon.com
|
| |
|
| |
| |
| |
| |
